Ultrasonics for Nanoimprint Lithography

Conference paper

C. L. Guo, R. Chen and Y. C. Chen

5th IEEE Conference on Nanotechnology 5th IEEE Conference on Nanotechnology

2004

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Title: Ultrasonics for Nanoimprint Lithography
Creators - without role: C. L. Guo
R. Chen - National Tsing Hua University
Y. C. Chen
Publication Details: 5th IEEE Conference on Nanotechnology 5th IEEE Conference on Nanotechnology
Identifiers: 0-7803-9199-3; 9957773613906774
Academic Unit: Department of Power Mechanical Engineering, College of Engineering, National Tsing Hua University
Language: Traditional Chinese
Resource Type: Conference paper