- Title
- Ultrathin nitride layers grown by MBE and their effects on interface states in Si MISFET
- Creators - without role
- R. T. FayfieldJ. ChenM. S. HagedornT. K. HigmanA. M. MoyK. Y. Cheng
- Publication Details
- 14th North American Conference on Molecular Beam Epitaxy
- Identifiers
- 9.78156E+12; 9957768307906774
- Academic Unit
- National Tsing Hua University
- Language
- Traditional Chinese
- Resource Type
- Conference paper
Conference paper
Ultrathin nitride layers grown by MBE and their effects on interface states in Si MISFET
14th North American Conference on Molecular Beam Epitaxy
1994
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