Abstract
This paper presents a novel micromachined method for fabricating micro-sized Ion Polymer Metal Composite (IPMC) devices with arbitrary shapes and demonstrates the technique to develop tiny accurately controlled surgical devices. This technology is beyond current state-of-the-art approaches in manufacturing large-scale IPMC devices, and provides a universal solution to construct micro-size-featured IPMC transducers with fine contours and no short-circuits. To demonstrate the usefulness of the method, hand-shaped grips (Fig. 1) for laparoscopic operation are designed, fabricated and tested. The fabricated device with the dimension of 6mm × 6mm × 80 μm shows that it could reach a displacement of 300μm at the location 1mm away from the anchor when a 0.5Hz square wave of 12 Volts is applied, and a maximum instantaneous force of 5mN output when it is driven with a 0.5Hz square wave of 6 Volts. © 2007 IEEE.