- Title
- Using Genetic Algorithm to Optimize the Wafer Exposure Yield
- Creators - without role
- 宏鍇 王Chen-Fu Chien
- Publication Details
- 2016 International Symposium on Semiconductor Manufacturing Intelligence
- Identifiers
- 9957767356406774
- Academic Unit
- Executive Cross-Discipline Master Program for Intelligent Manufacturing, Office of Academic Affairs, National Tsing Hua University
- Language
- English
- Resource Type
- Conference paper
Conference paper
Using Genetic Algorithm to Optimize the Wafer Exposure Yield
2016 International Symposium on Semiconductor Manufacturing Intelligence
2016
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