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Using Reverse-Trapezoid Cantilevers and Sealed Back-Chamber to Enhance the Performance of Mems Piezoelectric Microspeaker at Ultra-High Frequencies
Conference paper

Using Reverse-Trapezoid Cantilevers and Sealed Back-Chamber to Enhance the Performance of Mems Piezoelectric Microspeaker at Ultra-High Frequencies

Chin Tseng, Ting-Chou Wei, Chia-Hao Lin, Zih-Song Hu and Weileun Fang
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp.721-724
2024
DOI: https://doi.org/10.1109/MEMS58180.2024.10439460
Appears in  keyword about Physics

Abstract

MEMS microspeaker Piezoelectric Reverse-trapezoid Sealed back-chamber Size miniaturization Ultra-high frequencies Electronic Optical and Magnetic Materials Condensed Matter Physics Mechanical Engineering Electrical and Electronic Engineering
This study demonstrates a piezoelectric MEMS microspeaker containing the reverse-trapezoid and triangular membranes. A unique sealed back-chamber package is also presented. The design features: (1) reverse-trapezoid cantilever membranes providing better electro-acoustic efficiency, (2) additional triangular units expanding bandwidth at ultra-high frequencies (>7 kHz), (3) a unique sealed back-chamber to create additional chamber resonance, by coupling with the structure resonance could expand the bandwidth, (4) size miniaturization with total active area of only 2 mm2. The proposed microspeaker shows SPL (Sound-Pressure-Level) higher than 70 dB within the frequency range of 7 kHz ~ 20 kHz when actuated by 0.707 Vrms+10 VDC. The proposed design could be integrated with common dynamic drivers to make up the insufficient SPL at ultrahigh frequencies.

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