Vertically Stacked Nanowire Transistors Using Low-Temperature Microwave Annealing

Conference paper

Vertically Stacked Nanowire Transistors Using Low-Temperature Microwave Annealing

Ming-Kun Huang, Wen-Fa Wu and Chun-Hsing Shih

2014

Abstract

Vertically Stacked Nanowire Transistors;Low-Temperature Microwave Annealing

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Title: Vertically Stacked Nanowire Transistors Using Low-Temperature Microwave Annealing
Creators - without role: Ming-Kun Huang
Wen-Fa Wu - 國立清華大學原子科學院工程與系統科學系
Chun-Hsing Shih
Identifiers: 9957776967006774
Academic Unit: Department of Engineering and System Science, College of Nuclear Science, National Tsing Hua University
Language: Traditional Chinese
Resource Type: Conference paper