Abstract
The effects of object-to-image vibration are studied with the purpose to quantitatively define the maximum acceptable vibration level as a function of resolution, linewidth control, exposure and focus tolerances, proximity condition, and illumination coherence. The exposure-defocus trees and windows of optically projected images are used to derive the vibration tolerance as well as the optimum exposure as a function of vibration amplitude. Dimensionless variables for resolution, focus and exposure are used so that the results are universally applicable for any given diffraction-limited lens system. © 1989 SPIE.