- Title
- V型彎曲懸樑結構之熱動微致動器最佳角度之探討
- Creators - without role
- 謝宸碩國賓 李陳榮盛蔡瀚毅龔傑
- Publication Details
- The 6th Annual MEMS Conference
- Identifiers
- 9957771095206774
- Academic Unit
- Institute of Biomedical Engineering, College of Engineering, National Tsing Hua University
- Language
- English
- Resource Type
- Conference paper
Conference paper
V型彎曲懸樑結構之熱動微致動器最佳角度之探討
The 6th Annual MEMS Conference
2000
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