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Wavelength- And bandwidth-tunable filters based on MEMS-actuated microdisk resonators
Conference paper

Wavelength- And bandwidth-tunable filters based on MEMS-actuated microdisk resonators

Jin Yao, Ming-Chang M. Lee, David Leuenberger and Ming C. Wu
2006 Optical Fiber Communication Conference, and the 2006 National Fiber Optic Engineers Conference, Vol.2006, 1636450
2006

Abstract

A wavelength- and bandwidth- tunable filter with microelectromechanical- system (MEMS)-actuated waveguides is first demonstrated on a silicon-based microdisk resonator. Integrated microheaters enabled wavelength tuning up to 125GHz. Bandwidth can be tuned from 12.0 to 41.2GHz by coupling control. © 2005 Optical Society of America.

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