- Title
- White-light interferometer-Micro-profile measurement based on higher steps phase-shifting algorithm
- Creators - without role
- Ming-Hsing Shen - National Tsing Hua UniversityWei-Chung Wang - National Tsing Hua UniversityChi-Hung Hwang - National Institutes of Applied Research
- Publication Details
- Fringe 2013 - 7th International Workshop on Advanced Optical Imaging and Metrology, pp.341-344
- Identifiers
- 9783642363580; 9957767660806774
- Academic Unit
- Center for India Studies, Office of Academic Affairs, National Tsing Hua University
- Language
- English
- Resource Type
- Conference paper
Conference paper
White-light interferometer-Micro-profile measurement based on higher steps phase-shifting algorithm
Fringe 2013 - 7th International Workshop on Advanced Optical Imaging and Metrology, pp.341-344
2014
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