Wide Angle and High Frequency Resonant Piezoelectric MEMS Mirror for Laser Beam Scanning Application

Conference paper

Hung-Yu Lin, Hao-Chien Cheng, Shih-Chi Liu, Chih-Chen Hsu, Si-Han Chen, Ming-Ching Wu, Kai-Chih Liang, 梅鳳賴 and Wei-Leun Fang

2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)

25/06/2023

Abstract

Micromechanical devices;Actuators;Voltage measurement;Resonant frequency;Mirrors;Laser beams;Optical sensors

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Title: Wide Angle and High Frequency Resonant Piezoelectric MEMS Mirror for Laser Beam Scanning Application
Creators - without role: Hung-Yu Lin
Hao-Chien Cheng
Shih-Chi Liu
Chih-Chen Hsu
Si-Han Chen
Ming-Ching Wu
Kai-Chih Liang
梅鳳賴
Wei-Leun Fang
Publication Details: 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)
Identifiers: 9957772608506774
Academic Unit: Institute of NanoEngineering and Microsystems, College of Engineering, National Tsing Hua University
Language: English
Resource Type: Conference paper