Abstract
A full logic compatible 4T2R nonvolatile Static Random Access Memory (nv-SRAM) is successfully demonstrated in pure 40nm CMOS logic process. This non-volatile SRAM consists of two STI RRAMs embedded inside the 4T SRAM with minimal area penalty and full logic compatibility. Data is accessed through SRAM cells, and stored by switching one of the loading RRAMs by an unique self-inhibit feature. With this embedded STI RRAM storage nodes, data can be held under power-off mode with zero static power.