Abstract
We report the quantitative friction force measurement on various thin films based on the atomic force microscopy. The friction coefficients between different tips including silicon and tungsten carbide coated silicon tips and various films including titanium nitride, diamond-like carbon, and silicon have been obtained. It is clearly observed that the friction coefficients between harder materials are smaller than those between softer materials. In addition, the results also reveal little influence of film morphology of on friction coefficient for the tested titanium nitride films.