- Title
- 無電鍍鎳層於矽烷改質之N型矽芯片上之製程開發
- Creators - without role
- 贈傑 潘于倩 丁子健 衛 - 國立清華大學工學院化學工程學系中翰 吳虹君 潘桂武 黃
- Identifiers
- 9957767611906774
- Academic Unit
- Department of Chemical Engineering, College of Engineering, National Tsing Hua University
- Language
- Traditional Chinese
- Resource Type
- Conference paper
Conference paper
無電鍍鎳層於矽烷改質之N型矽芯片上之製程開發
2013
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