- Title
- 觸媒輔助鑽石膜平坦化技術
- Creators - without role
- 宏營 蔡
- Publication Details
- 第六屆奈米工程暨微系統技術研討會論文集
- Identifiers
- 9957766517606774
- Academic Unit
- Department of Power Mechanical Engineering, College of Engineering, National Tsing Hua University
- Resource Type
- Conference paper
Conference paper
觸媒輔助鑽石膜平坦化技術
第六屆奈米工程暨微系統技術研討會論文集
2002
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