- Title
- 銅薄膜的微結構及電性之探討及其在微機電系統之應用
- Creators - without role
- 謝宸碩吳智豪國賓 李楊哲勛盧陽明黃文星
- Publication Details
- The 4th Nano Engineering and Micro System Technology Workshop
- Identifiers
- 9957766913806774
- Academic Unit
- Institute of Biomedical Engineering, College of Engineering, National Tsing Hua University
- Language
- English
- Resource Type
- Conference paper
Conference paper
銅薄膜的微結構及電性之探討及其在微機電系統之應用
The 4th Nano Engineering and Micro System Technology Workshop
2000
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