- Title
- 鋁鈮矽鉭鋯多元碳氮化物薄膜之結構與性質研究
- Creators - without role
- 凱閔 許昱成 郭樹均 林 - 國立清華大學工學院材料科學工程學系
- Identifiers
- 9957772363806774
- Academic Unit
- National Tsing Hua University
- Language
- Traditional Chinese
- Resource Type
- Conference paper
Conference paper
鋁鈮矽鉭鋯多元碳氮化物薄膜之結構與性質研究
2015
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