- Title
- 鎢薄膜機械性質及應力量測
- Creators - without role
- 卓煇 周 - 國立清華大學工學院材料科學工程學系士惟 周
- Publication Details
- The Proc. of 1994 Annu. Conf. of Chinese Soc. for Mat. Sci., p230 The Proc. of 1994 Annu. Conf. of Chinese Soc. for Mat. Sci., p230, p.230
- Identifiers
- 9957774786406774
- Academic Unit
- Department of Materials Science and Engineering, College of Engineering, National Tsing Hua University
- Language
- Traditional Chinese
- Resource Type
- Conference paper
Conference paper
鎢薄膜機械性質及應力量測
The Proc. of 1994 Annu. Conf. of Chinese Soc. for Mat. Sci., p230 The Proc. of 1994 Annu. Conf. of Chinese Soc. for Mat. Sci., p230, p.230
1994
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