6 GHz Lithium Niobate on Insulator Low-Loss Saw Delay Line Adapting Non-Leaky Composite Waveguide Mode

Z.-Q. Lee; S.-Y. Huang; T.-H. Hsu; J. Campbell; J. Kramer; R. Lu; M.-H. Li

doi:10.1109/MEMS61431.2025.10917993

會議論文集

6 GHz Lithium Niobate on Insulator Low-Loss Saw Delay Line Adapting Non-Leaky Composite Waveguide Mode

Z.-Q. Lee, S.-Y. Huang, T.-H. Hsu, J. Campbell, J. Kramer, R. Lu 和 M.-H. Li

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 頁碼.1149-1152

2025

DOI: https://doi.org/10.1109/MEMS61431.2025.10917993

Web of Science ID: WOS:001461007300287

摘要

Acoustic delay line (ADL)

C-band

composite waveguide mode (CWG mode)

lithium niobate on insulator (LNOI)

Acoustic delay lines

Acoustic surface wave devices

Acoustic waves

Electric delay lines

Electric insulators

Insertion losses

Organoclay

Silicon wafers

Acoustic delay line

C-bands

Composite waveguide mode

Composite waveguides

Lithium niobate

Lithium niobate on insulator

Low-loss

SAW delay line

Thin-films

Waveguides modes

Group delay

In this study, a high-performance C-band surface acoustic wave (SAW) delay line is demonstrated on a thin-film lithium niobate on insulator (LNOI) platform. By optimizing the thickness ratio of the LN and SiO2 layers, a non-leaky composite waveguide (CWG) mode with shear-horizontal (SH) surface motion is achieved. This mode offers inherently high electromechanical coupling and effectively confines acoustic energy within the thin-film LN layer. The resulting CWG-mode acoustic delay line (ADL), with a wavelength of 0.7 μm, achieves an insertion loss (IL) of 7 dB, a fractional bandwidth (FBW) of 3.14%, and a group delay (GD) of 21.8 ns at a center frequency of 6 GHz, demonstrating competitive performance compared to state-of-the-art time-delay devices operating in the same frequency range. © 2025 IEEE.

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詳細資料

題名: 6 GHz Lithium Niobate on Insulator Low-Loss Saw Delay Line Adapting Non-Leaky Composite Waveguide Mode
創作者：: Z.-Q. Lee - National Tsing Hua University
S.-Y. Huang
T.-H. Hsu - National Tsing Hua University
J. Campbell - The University of Texas at Austin
J. Kramer - The University of Texas at Austin
R. Lu - The University of Texas at Austin
M.-H. Li - National Tsing Hua University
出版者: Institute of Electrical and Electronics Engineers Inc.; NEW YORK
總頁數: 4
補助款備註: NSTC of Taiwan: 112-2221-E-007-103-MY3
This research is supported by the NSTC of Taiwan under grants 112-2221-E-007-103-MY3.
學術資源類型: 會議論文集
出版日期: 2025
出版資訊: Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 頁碼.1149-1152
語言: 英語

6 GHz Lithium Niobate on Insulator Low-Loss Saw Delay Line Adapting Non-Leaky Composite Waveguide Mode

摘要

檔案與連結 (1)

相關連結

指標

聯合國永續發展目標(SDGs)

詳細資料

National Tsing Hua University 社交媒體