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A 4.3 GHZ Lithium Niobate on Insulator Wideband Surface Acoustic Wave Delay Line with Multi-Mode Composition
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A 4.3 GHZ Lithium Niobate on Insulator Wideband Surface Acoustic Wave Delay Line with Multi-Mode Composition

S.-Y. Huang, Z.-Q. Lee, T.-H. Hsu, J. Campbell, J. Kramer, R. Lu 和 M.-H. Li
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 頁碼.1153-1156
2025
Web of Science ID: WOS:001461007300288

摘要

Acoustic delay line (ADL) lithium niobate on insulator (LNOI). multi-mode passband wideband Acoustic surface wave devices Digital filters Electric delay lines Electric insulators Group delay Hydraulic actuators Integrated circuit design Intermodulation Linear actuators Mechanical actuators Microactuators Model structures Silicon on insulator technology Silicon wafers Ultrasonic transducers Acoustic delay line Lithium niobate Lithium niobate on insulator . Mode composition Multi-mode passband Multimodes Novel techniques Pass bands Surface acoustic waves Wide-band Acoustic delay lines
In this study, we present a novel technique for expanding the bandwidth of surface acoustic wave (SAW) delay lines by leveraging the multi-mode behavior of thin-film acoustic waveguides. Through numerical analysis, we show that a wide and sharp "multi-mode passband"can be achieved by merging the responses of adjacent acoustic modes in an acoustic delay line (ADL) via a carefully optimized thickness-to-wavelength ratio of the waveguide. To validate this concept, we designed the ADL on a silicon-based thin-film lithium niobate-on-insulator platform (LN/SiO2/Si) equipped with single-phase unidirectional transducers (SPUDTs). Three waveguide surface topographies are experimentally analyzed to optimize the passband. With a wavelength (λ) of 1 μm, the proposed multi-mode passband ADL achieves a minimum insertion loss (IL) of 8.58 dB, a wide 3-dB fractional bandwidth (FBW) of 9.55%, and a large group delay (GD) of 35 ns at 4.3 GHz. The competitive performance of the proposed design, compared to state-of-the-art ADLs, underscores the significant potential of the multi-mode design concept for wideband radio frequency (RF) signal processing. © 2025 IEEE.

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https://www.scopus.com/inward/record.uri?eid=2-s2.0-105001660981&doi=10.1109%2fMEMS61431.2025.10917467&partnerID=40&md5=8bdb2d0281f4af1cb3d8da11bd3cc298檢視

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