Abstract
We propose a novel differential drive and sense double-ended tuning fork (DETF) with wing electrodes to reduce the motional resistance (R-m) while achieving excellent power handling. The devices are fabricated using back end of line (BEOL) materials of 0.18 mu m 1P6M CMOS process. The wing electrodes are added to the high-velocity region to achieve high transduction efficiency. This increases the device mass (m(r)) which requires increased stiffness (k(r)) to maintain the same resonance frequency. The proposed design has resonance at 1 MHz in vacuum under a dc bias (V-p) of 30V with R-m of 250 k Omega for a Q of 2,300. The device can sustain the input power of 438 nW delivered to the resonator, corresponding to -5 dBm of the drive power from the network analyzer (NA), which is around 2000X higher as compared to traditional capacitive MEMS resonator design.