摘要
This study presents a 2D piezoelectric MEMS micromirror featuring a novel hybrid spring and a supporting frame, achieving large 2 -axis optical scanning angles of 180°/150°. The hybrid spring composed of a serpentine structure and a rectangular structure, is designed to withstand large torsion and bending simultaneously, thereby enabling large scanning angles on both axes. Meanwhile, the supporting frame, consisting of a ringshaped structure and torsional springs, is designed to release spring connection induced stress and to enhance the scanning angle during rocking mode operation. Measurement results show maximum optical scanning angle of 180° at 5.0 kHz for the X-axis, and 150° at 10.9 kHz for the Y -axis, demonstrating its large angle scanning capability, both measured under atmospheric conditions. In addition, the device also demonstrates its ability to perform 2D Lissajous scanning.