摘要
This study presents a novel Coil-on-Hall sensing architecture that enables dual-mode magnetic and pressure detection, and further demonstrates a monolithic environmental sensing hub through CMOS-MEMS processes. The sensing architecture employs a single Coil-on-Hall structure capable of dynamically switching between magnetic and pressure sensing modes by adjusting the coil current. To address the inherent temperature sensitivity of Hall-effect sensors, a monolithically integrated thermometer is incorporated for calibration, thereby enhancing measurement accuracy. Moreover, the design integrates the proposed dual-mode Hall-type pressure and magnetic sensors with additional gas, humidity, and temperature sensors on the same chip, forming a multifunctional environmental sensing hub. The entire system is implemented using the 0.35 \mu\ \mathrm{m} TSMC 2P4M platform combined with in-house post-processing, demonstrating the feasibility of achieving compact, multifunctional sensor integration suitable for next-generation environmental monitoring applications.