摘要
This study presents a dual-axis MEMS scanner that employs double wing-shaped piezoelectric actuators and a combination of spring structures to achieve dual-axis scanning. The design enhances the scan angle through selective driving of paired electrodes. The double wingshaped actuators generate the driving forces and torques required for dual-axis motion, allowing the mirror plate to flexibly scan along both directions. The pivot spring serves as the primary structural element for x-axis actuation, while the supported and torsional springs enable y-axis scanning. Furthermore, the driving electrodes are strategically arranged according to the vibration mode shape, improving actuation efficiency and scan-angle performance. Through this mode-driven electrode design, the proposed scanner achieves at least 83 % enhancement in scan angle compared with the reference design. Experimental results show that the device attains an optical scan angle of 31° for x-axis scanning at 11.6 kHz and 11° for y-axis scanning at 7 kHz under a 10 V driving voltage.