Effects of ion energy distribution on topography dependent charging

會議論文集

Takashi Kinoshita, Shawning Ma, Masami Hane, James P. McVittie 和 Shaw-Ming Ma

Digest of technical papers - Symposium on VLSI Technology, (ISSUE 1996), 頁碼.188-189

1996

Web of Science ID: WOS:A1996BF88S00074

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題名: Effects of ion energy distribution on topography dependent charging
創作者：: Takashi Kinoshita - Integrated Software (United States)
Shawning Ma - Stanford University
Masami Hane - NEC (Japan)
James P. McVittie - Stanford SystemX Alliance
Shaw-Ming Ma
出版者: I E E E; NEW YORK
總頁數: 2
學術資源類型: 會議論文集
出版日期: 1996
出版資訊: Digest of technical papers - Symposium on VLSI Technology, (ISSUE 1996), 頁碼.188-189
語言: 英語