Enhanced temperature sensitivity of a single CMOS-MEMS resonator via resonant modes in orthogonal axes

Conference proceeding

Ming Huang Li, Chao Yu Chen, Cheng Syun Li, Chi Hang Chin and Sheng Shian Li

2013 Joint European Frequency and Time Forum and International Frequency Control Symposium, EFTF/IFC 2013, pp.539-542

2013

Abstract

back-end of line (BEOL)

beat frequency

CMOS-MEMS

dual-mode

resonators

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Title: Enhanced temperature sensitivity of a single CMOS-MEMS resonator via resonant modes in orthogonal axes
Creators: Ming Huang Li - Institute of NanoEngineering and MicroSystems, National Tsing Hua University, Taiwan
Chao Yu Chen - National Tsing Hua University
Cheng Syun Li - National Tsing Hua University
Chi Hang Chin - National Tsing Hua University
Sheng Shian Li - Department of Power Mechanical Engineering, National Tsing Hua University, Taiwan
Number of pages: 4
Resource Type: Conference proceeding
Date published: 2013
Publication Details: 2013 Joint European Frequency and Time Forum and International Frequency Control Symposium, EFTF/IFC 2013, pp.539-542
Language: English