Green Laser Crystallized Poly-Si Thin-film Transistor and CMOS Inverter using HfO2-ZrO2 Superlattice Gate Insulator and Microwave Annealing for BEOL Applications

Chih-Hsiang Chang; Siao-Cheng Yan; Chong-Jhe Sun; Ming-Yueh Huang; Bo-An Chen; Xin-Chan Zhong; Yi-Wen Lin; Yung-Chun Wu; IEEE

doi:10.23919/SNW57900.2023.10183972

會議論文集

Green Laser Crystallized Poly-Si Thin-film Transistor and CMOS Inverter using HfO2-ZrO2 Superlattice Gate Insulator and Microwave Annealing for BEOL Applications

Chih-Hsiang Chang, Siao-Cheng Yan, Chong-Jhe Sun, Ming-Yueh Huang, Bo-An Chen, Xin-Chan Zhong, Yi-Wen Lin 和 Yung-Chun Wu

IEEE Silicon Nanoelectronics Workshop, 頁碼.31-32

IEEE Silicon Nanoelectronics Workshop

01/01/2023

DOI: https://doi.org/10.23919/SNW57900.2023.10183972

摘要

Computer Science

Computer Science, Interdisciplinary Applications

Engineering

Engineering, Electrical & Electronic

Materials Science

Materials Science, Multidisciplinary

Nanoscience & Nanotechnology

Science & Technology

Science & Technology - Other Topics

Technology

We report the BEOL compatible poly-Si thin-film transistor (TFT) below 400 degrees C by green laser crystallization and microwave annealing. The TEM image reveals the HfO2-ZrO2 superlattice (SL-HZO) structure of the dielectric layer. The p-type device shows good electrical properties, including I-ON/I-OFF ratio > 10(6), subthreshold swing (SS) = 75 mV/dec, and low DIBL = 24.18 mV/V. Furthermore, we demonstrate the characteristics of the CMOS inverter and the voltage transfer curve (VTC) indicates the acceptable voltage gain.

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題名: Green Laser Crystallized Poly-Si Thin-film Transistor and CMOS Inverter using HfO2-ZrO2 Superlattice Gate Insulator and Microwave Annealing for BEOL Applications
創作者：: Chih-Hsiang Chang - Natl Tsing Hua Univ, Dept Engn & Syst Sci, Hsinchu, Taiwan
Siao-Cheng Yan - National Tsing Hua University
Chong-Jhe Sun - National Tsing Hua University
Ming-Yueh Huang - National Tsing Hua University
Bo-An Chen - Natl Tsing Hua Univ, Dept Engn & Syst Sci, Hsinchu, Taiwan
Xin-Chan Zhong - National Tsing Hua University
Yi-Wen Lin - National Tsing Hua University
Yung-Chun Wu - Natl Tsing Hua Univ, Dept Engn & Syst Sci, Hsinchu, Taiwan
IEEE
叢書: IEEE Silicon Nanoelectronics Workshop
出版者: IEEE
總頁數: 2
補助款備註: NSTC 109-2221-E-007-031-MY3 / National Science and Technology Council, Taiwan
學術資源類型: 會議論文集
出版日期: 01/01/2023
出版資訊: IEEE Silicon Nanoelectronics Workshop, 頁碼.31-32
語言: 英語

Green Laser Crystallized Poly-Si Thin-film Transistor and CMOS Inverter using HfO2-ZrO2 Superlattice Gate Insulator and Microwave Annealing for BEOL Applications

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