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Integrated Nanopore Device for Electronic Single Molecule Trapping in Femtolitre Cavities Fabricated by Self-Aligned Etching

Integrated Nanopore Device for Electronic Single Molecule Trapping in Femtolitre Cavities Fabricated by Self-Aligned Etching

Xinxin Liu, Valentin Dubois, Shyamprasad N. Raja, Shaufei Cheng, Yuming Yeh, Yingzong Juang, Hangting Hsueh, Weileun Fang, Goran Stemme Frank Niklaus
IEEE ... Symposium on Mass Storage Systems and Technologies, pp.1229-1232
19/01/2025
: https://doi.org/10.1109/MEMS61431.2025.10917579
DNA Electrodes entropic trapping Etching Fabrication femtoliter cavity integrated electrode KEYWORDS Nanopore Nanoscale devices Silicon Silver single molecule System-on-chip Through-silicon vias Ultrafast electronics
Single-molecule trapping and analysis are critical in understanding biomolecular processes at an unprecedented resolution. Traditional nanopore systems often face limitations in scalability and integration with electronic components, which complicates their use in compact, high-density applications. Addressing these challenges, we introduce a novel on-chip nanopore array system integrated with a silver (Ag) electrode and self-aligned femtolitersized cavities, representing an innovative approach for electronic single-molecule trapping. Our design utilizes a wafer-scale fabrication process with a buried electrode architecture, enabling the scalable production of high-density nanopore arrays without the need for through-wafer etching. Successful DNA translocation measurements demonstrate the system's potential as a versatile platform for single-molecule trapping and reaction studies.
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