Limitations of plasma charging damage measurements using MOS capacitor structures

會議論文集

Shawming Ma, Wael L.N. Abdel-Ati 和 James P. Mcvittie

MRS proceedings, 卷.428, 頁碼.349-354

1996

Web of Science ID: WOS:A1996BG81V00047

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題名: Limitations of plasma charging damage measurements using MOS capacitor structures
創作者：: Shawming Ma - Stanford University
Wael L.N. Abdel-Ati - Stanford University
James P. Mcvittie - Stanford University
總頁數: 6
學術資源類型: 會議論文集
出版日期: 1996
出版資訊: MRS proceedings, 卷.428, 頁碼.349-354
語言: 英語