- Title
- Mechanically-coupled CMOS-MEMS free-free beam resonator arrays with two-port configuration
- Creators
- Ming Huang Li - Institute of NanoEngineering and MicroSystems, National Tsing Hua Universit, TaiwanWen Chien Chen - National Tsing Hua UniversitySheng Shian Li - Department of Power Mechanical Engineering, National Tsing Hua Universit, Taiwan
- Resource Type
- Conference proceeding
- Date published
- 2011
- Publication Details
- 2011 Joint Conference of the IEEE International Frequency Control Symposium and European Frequency and Time Forum, IFCS/EFTF 2011 - Proceedings, pp.1-4
- Language
- English
Conference proceeding
Mechanically-coupled CMOS-MEMS free-free beam resonator arrays with two-port configuration
2011 Joint Conference of the IEEE International Frequency Control Symposium and European Frequency and Time Forum, IFCS/EFTF 2011 - Proceedings, pp.1-4
2011
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