摘要
This study reports a new pneumatic micropump featuring three membrane-enclosed air chambers with different volumes. When compressed air fills the chambers, the membranes are pushed downwards sequentially, resulting in the liquid in the underlying fluid channels to be pumped forward peristaltically. This new micropump can be operated by using a single electromagnetic valve (EMV). A maximum flow of 108 μl/min is obtained at a driving frequency of 10 Hz and an air pressure of 25 psi (172.4 kPa) when a membrane with a thickness of 80 μm and a microchannel with a width of 500 μm is tested. © 2006 Society for Chemistry and Micro-Nano Systems.