- 題名
- Prediction of Plasma Charging Induced Gate Oxide Tunneling Current and Antenna Dependence by Plasma Charging Probe
- 創作者：
- Shawming Ma - Stanford SystemX AllianceJ.P. Mcvittie - Stanford SystemX Alliance
- 出版者
- IEEE
- 總頁數
- 4
- 學術資源類型
- 會議論文集
- 出版日期
- 1996
- 出版資訊
- 1996 1st International Symposium on Plasma Process-Induced Damage : 13-14 May 1996, Santa Clara, California, USA, 頁碼.20-23
- 語言
- 英語
會議論文集
Prediction of Plasma Charging Induced Gate Oxide Tunneling Current and Antenna Dependence by Plasma Charging Probe
1996 1st International Symposium on Plasma Process-Induced Damage : 13-14 May 1996, Santa Clara, California, USA, 頁碼.20-23
1996
Web of Science ID: WOS:A1996BG17A00005