摘要
In the paper, a modified metal-organic decomposition (MOD) process has been developed for the fabrication of PZT thick films. Nano-sized PZT powders, around 5-15 nm, were first synthesized using hydrolysis of PZT alkoxide precursors, and then incorporated into a precursor containing PZT-carboxylates (0.2 M), followed by spin-coating process. The properties of nano-powder incorporated PZT precursors solution influences the spin-coating characteristics markedly, which is presumably due to the modification on the cross-linking behavior occurred in the aged precursor solution. The pyrolysis process prior to the post-annealing of the spin-coated PZT films also imposes significantly effect on the microstructural and electrical properties of the PZT films. Larger thickness in each layer, about 0.2 μm per coating, can be achieved by using such a novel MOD process. The ferroelectric properties of the PZT films were optimized for the films pyrolyzed at 400°C (30 min), and post-annealed at 650°C (1 hr). The corresponding remanent polarization (Pr) and coercive field (Ec) are Pr = 18 μC.cm2 and Ec = 36.8 KV/cm.
