- 題名
- Real time measurement of transients and electrode edge effects for plasma charging induced damage
- 創作者：
- Shawming Ma - Stanford SystemX AllianceJames P. McVittie - Stanford SystemX AllianceIEEE, ELECTRON DEVICES SOC
- 總頁數
- 4
- 學術資源類型
- 會議論文集
- 出版日期
- 1994
- 出版資訊
- Technical digest - International Electron Devices Meeting, 頁碼.463-466
- 語言
- 英語
會議論文集
Real time measurement of transients and electrode edge effects for plasma charging induced damage
Technical digest - International Electron Devices Meeting, 頁碼.463-466
1994
Web of Science ID: WOS:A1994BC55U00105
指標
1 檢視次數