Si Multi-Bridge Channel CMOS Inverter with Five Stacked Layers Fabricated from Epitaxial Si0.8Ge0.2/Si Multilayers

W.-Y. Chang; G.-L. Luo; C.-L. Chu; S.-H. Chen; F.-K. Hsueh; B.-Y. Chen; Y.-J. Lee; W.-F. Wu

doi:10.1109/VLSITSA60681.2024.10546459

會議論文集

Si Multi-Bridge Channel CMOS Inverter with Five Stacked Layers Fabricated from Epitaxial Si0.8Ge0.2/Si Multilayers

W.-Y. Chang, G.-L. Luo, C.-L. Chu, S.-H. Chen, F.-K. Hsueh, B.-Y. Chen, Y.-J. Lee 和 W.-F. Wu

2024 International VLSI Symposium on Technology, Systems and Applications, VLSI TSA 2024 - Proceedings

2024

DOI: https://doi.org/10.1109/VLSITSA60681.2024.10546459

摘要

Bridges

CMOS integrated circuits

Dry etching

Atomic layer etching

Channel implantation

Channel widths

CMOS devices

Dry etching process

Epitaxial Si

Etching process

N-channel

Selective etching

Stacked layer

Fabrication

This study successfully fabricates a CMOS device with an advanced 5-layer Si multi-bridge channel (MBC) through a highly selective dry etching process explicitly designed for GAA-FET manufacturing. The investigation employs highly selective etching processes, Atomic Layer Etching (ALE), to explore the impact of p-/n-channel implantation with varying channel widths in creating highly stacked multi-bridge channels for advancing CMOS GAAFET technology. © 2024 IEEE.

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url

https://www.scopus.com/inward/record.uri?eid=2-s2.0-85196724021&doi=10.1109%2fVLSITSA60681.2024.10546459&partnerID=40&md5=fc6c44fc448bc7444b2c485719964a65檢視

指標

1 檢視次數

詳細資料

題名: Si Multi-Bridge Channel CMOS Inverter with Five Stacked Layers Fabricated from Epitaxial Si0.8Ge0.2/Si Multilayers
創作者：: W.-Y. Chang - Taiwan Semiconductor Manufacturing Company (Taiwan)
G.-L. Luo - Taiwan Semiconductor Manufacturing Company (Taiwan)
C.-L. Chu - Taiwan Semiconductor Manufacturing Company (Taiwan)
S.-H. Chen - Taiwan Semiconductor Manufacturing Company (Taiwan)
F.-K. Hsueh - Taiwan Semiconductor Manufacturing Company (Taiwan)
B.-Y. Chen - Taiwan Semiconductor Manufacturing Company (Taiwan)
Y.-J. Lee - National Yang Ming Chiao Tung University
W.-F. Wu - Taiwan Semiconductor Manufacturing Company (Taiwan)
出版者: Institute of Electrical and Electronics Engineers Inc.
學術資源類型: 會議論文集
出版日期: 2024
出版資訊: 2024 International VLSI Symposium on Technology, Systems and Applications, VLSI TSA 2024 - Proceedings
語言: 英語

Si Multi-Bridge Channel CMOS Inverter with Five Stacked Layers Fabricated from Epitaxial Si0.8Ge0.2/Si Multilayers

摘要

檔案與連結 (1)

相關連結

指標

詳細資料

National Tsing Hua University 社交媒體