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Spectrum-Clean LiNbO3/SiO2/SI SH-SA W Resonators Utilizing Combined Electrode Apodization and Propagation Angle Twisting
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Spectrum-Clean LiNbO3/SiO2/SI SH-SA W Resonators Utilizing Combined Electrode Apodization and Propagation Angle Twisting

Z.-Q. Lee, Y.-C. Yu, Y.-C. Liao, C.-C. Lin, S.-Y. Huang 和 M.-H. Li
International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers, (2025), 頁碼.303-306
2025

摘要

Lithium niobate on insulator (LNOI) shear horizontal surface acoustic wave (SH-SAW) resonator spurious-free Acoustic surface wave devices Acoustic wave propagation Acoustic waves Electrodes Electromechanical devices Lithium Lithium compounds Niobium compounds Resonators Shear flow Silicon compounds Solid-state sensors Apodizations Combined electrodes Lithium niobate Lithium niobate on insulator Performance Propagation angle Shear horizontal surface acoustic wave resonators Spectra's Spurious-free Thin-films Electromechanical coupling
In this study, a high-performance spurious-free thin-film lithium niobate on insulator (LNOI) shear-horizontal surface acoustic wave (SH-SAW) resonator is developed using a combination of propagation angle twisting and crossed-interdigital transducers. By aligning the wave propagation directions to the zero-coupling orientations of the Rayleigh mode and applying electrode apodization, both Rayleigh and transverse spurious modes are effectively suppressed. The fabricated SH-SAW resonator, operating at 839 MHz, achieves a nearly spurious-free spectrum spanning 0.1 to 3 GHz, with an effective electromechanical coupling coefficient (keff2) of 24.2%, a maximum Bode-Q factor of 552, and an admittance ratio (AR) of 68.8 dB, showing promising potential for applications in wideband radio frequency (RF) circuit. © 2025 IEEE.

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https://www.scopus.com/inward/record.uri?eid=2-s2.0-105030240102&doi=10.1109%2fTransducers61432.2025.11109278&partnerID=40&md5=b17b48becfa6e013d26b6f64151474e5檢視

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