Study PBTI and NBTI of GAA-MNC TFTs

T.-K. Kang; C.-K. Wang; I.-H. Tsai; R.-S. Hung; Y.-F. Chen; W.-F. Wu

doi:10.1109/IMPACT.2010.5699506

會議論文集

Study PBTI and NBTI of GAA-MNC TFTs

T.-K. Kang, C.-K. Wang, I.-H. Tsai, R.-S. Hung, Y.-F. Chen 和 W.-F. Wu

International Microsystems Packaging Assembly and Circuits Technology Conference, IMPACT 2010 and International 3D IC Conference, Proceedings

2010

DOI: https://doi.org/10.1109/IMPACT.2010.5699506

摘要

Microsystems

Three dimensional

On-currents

Room temperature

Subthreshold swing

Gallium alloys

GAA-MNC TFT shows higher on-current, higher mobility, steeper subthreshold swing and lower threshold voltage than CP TFT. In this letter, we study in view of PBTI and NBTI of GAA-MNC TFT. Under room temperature ,the PBTI or NBTI of GAA-MNC TFT show more serious degradation than CP TFT. In order to improve reliability ,we use plasma to passivate defect in the oxide/channel interface.

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https://www.scopus.com/inward/record.uri?eid=2-s2.0-79951652340&doi=10.1109%2fIMPACT.2010.5699506&partnerID=40&md5=058434df62e14c24e84875267ed07d1c檢視

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詳細資料

題名: Study PBTI and NBTI of GAA-MNC TFTs
創作者：: T.-K. Kang - Feng Chia University
C.-K. Wang - Feng Chia University
I.-H. Tsai - Feng Chia University
R.-S. Hung - Feng Chia University
Y.-F. Chen - Feng Chia University
W.-F. Wu - National Institutes of Applied Research
學術資源類型: 會議論文集
出版日期: 2010
出版資訊: International Microsystems Packaging Assembly and Circuits Technology Conference, IMPACT 2010 and International 3D IC Conference, Proceedings
語言: 英語

Study PBTI and NBTI of GAA-MNC TFTs

摘要

檔案與連結 (1)

相關連結

指標

詳細資料

National Tsing Hua University 社交媒體