Abstract
High-Aspect-Ratio Micromachining (HARM) developed recent years has made many devices more versatile compared with surface micromachining process, but it also met some challenges not occurred before. Those issues, which made HARM structure design with thickness/width limitation as well as DOF constraint, are discussed in this work. Accordingly, a novel BELST Fabrication Platform that exploits the (111) wafer process and heavily boron diffusion is proposed. Through some delicate designs in this platform, those design constraints can substantially been reduced, and various microstructure demands of in-plane/out-of-plane devices can also be fulfilled. To further prove it’s feasibility in electrostatic actuators and sensors, Dual Mass Resonator (DMR) and Micro Vibrating Gyroscope (MVG) are studied as the research carrier in this thesis. All the design features incorporated in DMR and MVG design are successfully fabricated using BELST fabrication platform, while the resonator testing also reveals the expected result. In summary, the developed BELST Fabrication Platform can possess most existing merits as well as resolve many design constraints in existing HARM process. Its capability and simplicity are believed to make itself more competitive and promising for many applications.