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Direct measurement of electrostatic fields using single Teflon nanoparticle attached to AFM Tip
Dissertation

Direct measurement of electrostatic fields using single Teflon nanoparticle attached to AFM Tip

Chang, Joe-Ming
Doctor of Philosophy (PHD), 國立清華大學, 奈米工程與微系統研究所
2013

Abstract

原子力顯微鏡 靜電作用力 奈米球 駐極體 靜電力顯微鏡 AFM Electrostatic force Nano particle electret EFM
This study designed and fabricated a novel microscopy probe for the direct measurement of the electrostatic field (mainly Coulombic force) of electrical samples. The probe is based in the principle of using an insulating cantilever for the attachment of a charged nanoparticle, such that the probe acts as a point charge applicable in the detection of electrostatic force. We attached a single 210 nm Teflon nanoparticle (sTNP) to the vertex of a silicon nitride (Si3N4) atomic force microscope (AFM) tip and applied charge via contact electrification. We then verified the characteristics of the charged sTNP tip, such as charge duration and consistency, and fabricated an N2 drying system to facilitate the measurement of electrostatic field. To demonstrate the efficacy of electrostatic force detection, we used the charged sTNP tip to measure the electrostatic field adjacent to a parallel plate condenser using 30 nm gold /20 nm Titanium as electrodes. The proposed technique provides resolution of 250 nm / 100 nm along the X / Z-axes and a measured minimum electrostatic force accurate to within 50 pN.

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