High-Q MEMS Resonators With Differentially Piezoresistive Sensing Configuration

Dissertation

Li, Cheng Syun

Doctor of Philosophy (PHD), 國立清華大學, 奈米工程與微系統研究所

2015

Abstract

金氧半導體微機電技術

絕緣層覆矽微機電技術

射頻微機電技術

微機械共振器

靜電換能

壓阻換能

非線性

功率負載能力

CMOS-MEMS

SOI-MEMS

RF-MEMS

micromechanical resonator

capacitive transduction

piezoresistive transduction

nonlinearity

power handling

因申請專利緣故，資料延後公開

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Title: High-Q MEMS Resonators With Differentially Piezoresistive Sensing Configuration
Translated title: High-Q MEMS Resonators With Differentially Piezoresistive Sensing Configuration
Creators: Li, Cheng Syun
Contributors: Li, Sheng Shian (Advisor)
Awarding Institution: 國立清華大學, 奈米工程與微系統研究所; Doctor of Philosophy (PHD)
Theses and Dissertations: Doctor of Philosophy (PHD), 國立清華大學, 奈米工程與微系統研究所
Language: English
Resource Type: Dissertation
Date published: 2015