Abstract
Resonant inelastic X-ray scattering (RIXS) is a powerful technique for studying electronic structure. In the soft X-ray regime, RIXS provides essential information about local and collective excitations which can't be obtained from other X-ray spectroscopic methods, such as X-ray absorption spectroscopy (XAS) and photoemission spectroscopy. However, a RIXS measurment requires high photon flux. In order to increase the efficiency of RIXS measurement, we developed a highly efficient beamline and spectrometer of inelastic soft X-ray scattering at high resolution. The design and construction of the beamline and spectrometer was based on the energy compensation principle of grating dispersion. We used two bendable gratings to achieve a good energy resolution by eliminating the defocus and comma aberrations. The total resolving power for incident photon energy covering from the Fe L3-edge to the Cu L3-edge was between 7500 and 10,000. The design of this monochromator-spectrometer system also greatly enhances the efficiency of measurement of inelastic soft X-rays scattering. In this dissertation, we present commissioning results of this new RIXS beamline and its capability of measuring momentum-resolved RIXS of NiO and CuO.