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Preparation and characterization of artificial BiFeO3/SrTiO3 superlattices by radio-frequency sputtering
Dissertation

Preparation and characterization of artificial BiFeO3/SrTiO3 superlattices by radio-frequency sputtering

Chiu, Shang-Jui
Doctor of Philosophy (PHD), 國立清華大學, 工程與系統科學系
2011

Abstract

鉍鐵氧化物 超晶格 濺鍍 應變效應 鐵電性質 BiFeO3 superlattice sputtering strain effect ferroelectric property
The objective of the study is to investigate effects of strain state, ion doping, and bottom electrode on BiFeO3 (BFO)/SrTiO3 (STO) superlattice structure. The BFO/STO and La-doped BFO/STO superlattice were deposited by radio frequency magnetron sputtering with optimized coating conditions. The epitaxial growth of superlattice films was confirmed by X-ray reflection and diffraction patterns. The BFO/STO superlattice with a well defined crystal structure, large strain state ~1.3% which approaches the critical value of 1.42% and large remnant polarization value at deposition temperature 600-700oC. The measurements of Pr values, piezoelectric coefficient d33, and the leakage current density of superlattice films demonstrate that ferroelectric properties of BFO/STO superlattice thin films could be enhanced with increasing in-plane strain. The BFO/STO superlattice with small BFO/STO sublayer thickness exhibits a pseudo-cubic structure without strain relaxation. Similar with tetragonal structure, superlattice films with pseudo-cubic structure exhibit a clear strain improvement on ferroelectric properties. The substitution of La (5 atomic %) in BFO sublayer can improve the leakage property of superlattice films. The La-doped BFO/STO superlattice films exhibited excellent and saturated hysteresis loops, larger piezoelectric coefficient (d33) on LaNiO3 (LNO) electrode than films on Nb-doped doped STO substrate. High leakage property of La-doped BFO sublayer and suitable resistivity of LNO bottom electrode are the major factor of enhancement of ferroelectric properties of superlattice films.

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