Abstract
本論文為國內第一篇以二次離子質譜術 ( Secondary ion mass spectrometry, SIMS)為主題所撰寫成的博士論論文。二次離子質譜術 自1989年由凌永健教授引進國內後，才開始應用在化學方面的研究。目前 國際間有關二次離子質譜術在化學方面的應用研究已有約20年歷史，但有 機物質如聚合物的離子形成理論尚未有定論，因此有關離子形成機制的研 究是中非常重要的。本論文應用二次離子質譜術中的靜態質譜分析與縱深 分佈分析功能分別對均質有機聚合物質、鋁╱聚二氟乙烯、聚甲基丙烯酸 甲酯與聚碳酸酯摻合體、聚氧乙烯壬烷基苯基醚與聚甲基丙烯酸甲酯的混 合膜、聚氧乙烯壬烷基苯基醚與聚甲基丙烯酸甲酯和聚碳酸酯的混合膜、 聚氧乙烯壬烷基苯基醚在銅箔上之殘留以及聚甲基丙烯酸甲酯表面之光學 鍍膜與耐隆布料表面的氟素撥水撥油劑等進行實驗研究並獲致相當多的結 果資料; 並且建立質量範圍擴充至2000 amu的基本功能，以供後進研究者 的參考。聚合物一般為非導體，需特別注意電荷累積與表面損傷的問題， 縱深分佈分析時，則需考慮離子束混合與離析效應的現象。適當地運用靜 態二次離子質譜分析，可鑑定聚合物表面的化學結構與狀態、有機物在材 料表面的污染以及有機小分子與大分子的混合情形等。縱深分佈分析可觀 察聚合物表面積荷與損傷，更可用來描述有機聚合物╱金屬、金屬╱有機 聚合物以及有機聚合物╱有機聚合物的界面。 This Ph.D dissertation is the domestically first one based on SIMS(Secondary ion mass spectrometry). SIMS was introduced into R.O.C. by Professor Ling in 1989 and was started to be used in chemical research. Internationally, SIMS has been applied in chemical research for about 20 years. The ion formation for organic materials, e.g. polymer, was still ambiguous. The research on the mechanism of iob formation is thus important. This study adapted static SIMS and depth profiling for the exploraion of homogeneous polymers, aluminum/polyvinylidene fluoride(PVDF), polymer blend of polymethyl methacrylate(PMMA) and polycarbonate(PC), mixing film of polyoxyethylene nonyl phenyl ether(NPEO) and PMMA, film fo NPEO mixed with PMMA/PC blend, NPEO residues on copper filme, optical coating on PMMA and fluorine-contained water/oil repellent on nylon cloths. Enormous reslts were obtained. The basic operation for expanding mass range to 2000 amu is also developed in this dissertation. Most of polymers are insulators. Accordingly, charge accumulation and surface damage must be cautioned during SIMS analysis. As for depth profiling, ion beam mixing and segregation should be considered. Static SIMS can be used for the characterization of surface structure of polymers, organic contamination on materials and surface phenomena of organic molecules and macromolecules mixture. Depth profiling can be used for the observation of charging effect and surface damage as well as for the decipher of polymer/metal, metal/polymer and polymer/polymer interface.