The Exploration of Zr-Cu-based Thin Film Metallic Glass by Compositional Control and Taguchi Design of Experiment Method

Dissertation

Lee, Joseph

Doctor of Philosophy (PHD), 國立清華大學, 材料科學工程學系

2017

Abstract

金屬玻璃

金屬玻璃薄膜

成分控制

磁控濺鍍

抗菌

Cu-Si擴散阻障層

田口實驗設計法

metallic glass

thin film metallic glass

composition control

antimicrobial

Cu-Si diffusion barrier

Taguchi method

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Title: The Exploration of Zr-Cu-based Thin Film Metallic Glass by Compositional Control and Taguchi Design of Experiment Method
Translated title: The Exploration of Zr-Cu-based Thin Film Metallic Glass by Compositional Control and Taguchi Design of Experiment Method
Creators: Lee, Joseph
Contributors: Duh, Jenq-Gong (Advisor)
Awarding Institution: 國立清華大學, 材料科學工程學系; Doctor of Philosophy (PHD)
Theses and Dissertations: Doctor of Philosophy (PHD), 國立清華大學, 材料科學工程學系
Language: English
Resource Type: Dissertation
Date published: 2017