Abstract
There has been considerable interest in developing ferroelectric thin films for integrated optoelectronic devices because these films have some advantageous physical characteristics. In recent years, PZT（Pb（ZrxTi1-x）O3）has been an interesting material for optical waveguide devices due to its excellent functional properties, such as piezoelectricity, pyroelectricity, and EO effects. In this thesis, we studied the modeling, design and fabrication feasibility of PZT slab photonic crystal optical waveguides, which incorporated 2-D photonic crystal geometries for lateral confinement of light and total internal reflection for vertical confinement. The propagation loss could be substantially reduced for properly designed photonic crystal waveguides. We designed and fabricated Y-branch Beam-splitter. Towards this goal, we did the band structure calculations of various 2D photonic crystals and studied the EO effect of PZT. The results of the band structure were used as a guide for proper waveguide designs. Then we did 2-D and 3-D photonic crystal waveguides simulation to verify the design. We used Ebeam lithography to define the photonic crystal patterns and ion beam etcher for the etching process. The PZT photonic crystal waveguides and Y-branch Beam-splitter were successfully designed and fabrication.