Abstract
This thesis presented a theoretical and experimental investigation for the glass imprinting process. The properties, such as composition, viscosity, mechanical strength, of various glass materials were first studied and cross-checked by a broad survey of existing literatures. Then, the physical model for the imprinting process, which features a mold pressed into glass flow at constant temperature, was constructed. The finite element software ANSYS Multiphysics 10.0 and 141 fluid square elements were used in the simulation, which assumed the mold to be rigid and the glass Newtonian flow. In the simulation, the mold imprinting velocity was the major input parameter, the following factors were studied: pressure evolution at various stages, substrate effect, temperature effect, size effect, and flow profile within mold cavity. The experiment was performed by using a labmade hot embossing apparatus, which possessed the functions such as temperature, force, imprinting process controls. In addition, fabrication of micro- and nano-scale silicon molds was illustrated as well. The glass profile and filling ratio in the cavity were observed with an FESEM, on the basis of which, we discussed the temperature, holding time, and pressure distribution. The experimental results were compared with simulation ones, good agreement between them illustrated the FEM simulation was correct and could be employed as guidelines for conducting experiments. The proposed glass imprinting process has potential to be employed in practice. The labmade hot embossing system with precision measurement equipment was used to verify the possibility of precision V-groove channels to support and align optical fibers in fiber array components of optical communication systems. Finally, conclusions were made and future work was pointed out.