Abstract
The most important advantage of multielectrode array (MEA) is the high recording density, providing rich neural information inside the brain. However, the recording range, efficiency of MEA, and the biocompatibility issues of MEA still request more effort to make further improvement. Based on two fabrication platforms, the glass reflowing process and benzocyclobutene (BCB) temporally bonding process, this thesis design and implement four different types of MEA. Glass based MEAs integrated with embedded low-resistance silicon are fabricated, and an assembly process are proposed to implement a 3D glass MEA to extend the recording range. Traditional planar type MEA has restricted recording range at one side of shaft. To address this issue, a glass MEA integrate with embedded silicon electrode and a Si MEA with electrodes on two sides of shaft are fabricated to record neurons around the shaft. In the final part of this thesis, a MEA integrates ultra-thin polyimide wing electrode and thick silicon probe shaft is implemented through the BCB temporally bonding process. The polyimide wing electrodes protruding from the shaft move the electrodes away from the severe trauma area induced by the silicon shaft, and the ultra-thin polyimide wing are also expected to induce less trauma during insertion. Thus, the biocompatibility of this MEA is improved. The in-vivo neural signal recording result from different types of MEA fabricated in this thesis successfully demonstrate the recording ability, and also demonstrate the recording properties and biocompatibility of specific types of MEA.