Abstract
Nanoporous anodic aluminum oxide (np-AAO) exists tunable material properties in application of various researches. This dissertation developed batch and reproducible np-AAO technology by micro/nano fabrication processes in order to applied electrical, optical, and mechanical properties of np-AAO into micro devices. This study further presents the use of np-AAO for interferometric color pixel application. The merits of this np-AAO color pixels are as follows, (1) porosity of np-AAO layer can be easily adjusted by fabrication process to modulate the refractive index of proposed device, (2) color-pixels of different porosities (refractive indices) can be implemented and integrated on single np-AAO layer by process for different colors modulation, (3) in-use stiction of the actuation np-AAO membrane can be reduced by the nanoporous textures, (4) dielectric charging can be largely reduced by np-AAO material in this study, thus the offset voltage of the polarities close to zero and hysteresis curves are symmetric, (5) driving (pull-in) voltage can be reduced due to superior dielectric constant of np-AAO, and (6) in addition, the morphology of np-AAO with Al half-reflector could scatter the reflect light to further enhance the view-angle of the color-pixels. The tests demonstrate the performance of presented np-AAO for interferometric color pixels.