Abstract
The micromachined suspensions have been extensively applied for the micro sensors, fiber holder, and the suspension arm of AFM. In this research, the V-shaped and semi-circular microbeams were devised and studied to improve the performance of the mciromachined suspension. The side view of the V-shaped and semi-circular beam is similar to that of the cantilever. However, the end conditions of the V-shaped and semi-circular beam are similar to that of the microbridge. The finite element model has been established to predict the deformation of these microbeams. Fabrication and characterization of various microbeams has been conducted to observe the out-of-plane deformation caused by residual stress. As demonstrated through the analytical and experimental results, the out-of-plane deformation due to bending and buckling is significantly reduced for the semi-circular microbeam. This article also measured the properties of thin films using nano indenter to accurately design and predict the performance of microbeams. The Young’s modulus and strength of thin films are determined by the load-deflection of a bent cantilever. In summary, various flat micromachined suspensions have been designed and realized in this research, so as to improve the performance of MEMS devices.