Abstract
An innovative technology such as high power micro-electromagnetic actuator has been involved in this dissertation to fabricate a micro-optical switch. Precise substrate etching technique is also applied to form functional mesa in the silicon-based v-groove to enhance the fiber to optical switch coupling efficiency. On the other hand, micro-ball lens is developed through lithography method with precise alignment and configuration. It improves the coupling performance significantly. As to the design of microactuator, close loop of soft magnet, Ni/Fe 80/20, is used to concentrate the magnetic flux to compensate the shortage of the microactuator’s output force. Furthermore, hard magnet is sputtered with less than 300°C on the suspension diaphragm to reach the two-way actuation function, i.e., repulsive and attractive force that will increase the mobility of the microactuator. Patternable bonding technique with low bonding temperature and without electro field disturbance uses photosensitive polymer to define proper bonding pad to finish multi-substrate optical switch. Then, laser beam with low power density is coupled into the optical switch, 96.1% beam power is reflected with loss less than -0.25dB. If the laser beam is focused before coupling into fiber, the transmittance of laser beam through the micro ball lens is about 70 % with loss less than –1.55dB. The final test results show that switch frequency is larger than 1.8KHz; more thane 2´106 working cycle is found.